Avoid using the techs that reduce planet quality, unless you KNOW you're going to lose. If you're invading a 20b planet with 1b troops, use mass drivers to maximize the casualties - the planet won't lose PQ unless you win the invasion.
If you have higher soldiering than your opponent, use minisoldiers if available. It improves the advantage you already have, and does minimal damage.
If the enemy has higher soldiering than you, use tidal disruptors. Yes, you will lose much of what's on the planet, but it cuts their advantage over you more than minisoldiers boosts your advantage. Absolutely devastating against Dread Lords (not that you really need it, but whatever).
If the enemy has low morale, (or can be made to have low morale with spies in DA/TA) use information warfare. It's pretty easy to end an invasion with more troops than you had on your transport. It is expensive, but you'll make much of that up by not losing buildings to tidal disruptors and not having a really low population planet.